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Microwave Plasma Treatment System

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A total solution for PLASMA processing and performance testing dedicated to the semiconductor industry

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SPV-24M①.png

SPV-24MMicrowave In-Line Vacuum Plasma Cleaner

Microwave in-line vacuum plasma cleaning machine specially designed for the semiconductor industry, for semiconductor chip bonding pretreatment, plastic sealing pretreatment, photoresist removal, metal bonding pretreatment. The plasma is not charged
SPMV-100H列表图片.png

SPMV-100HCavity microwave vacuum plasma cleaner

The plasma of free radical molecules has no bias, will not cause electrical damage to the product, and the degumming rate is high
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